OMT-GX62半導(dǎo)體芯片晶圓檢查測(cè)量顯微鏡
工業(yè)顯微鏡廣泛應(yīng)用于半導(dǎo)體,電子工業(yè)進(jìn)行晶體,集成電路的檢驗(yàn)和科學(xué)研究.
配備有反射照明,成象和觀(guān)察系統(tǒng),偏光裝置.
Industrial microscope is widely used for crystal, integrated circuit (IC) examination
and research. It is supplied with reflected illumination, imaging and viewing system,
polarized imaging system.
規(guī)格 Specifications
◇ 無(wú)限遠(yuǎn)光學(xué)系統(tǒng),管鏡焦距200mm
Infinitive Optical System, Tube Lens Focal Length 200mm
◇ 鉸鏈?zhǔn)饺跨R筒,30°傾斜, 瞳距55-75mm
Compensation Free Trinocular Tube, Inclined at 30°, Interpupillary Distance 55-75mm
◇ 高眼點(diǎn),大視場(chǎng)目鏡WF10X/22
High Point and Wide Field Eyepiece WF10/22
◇ 長(zhǎng)工作距離,平場(chǎng)復(fù)消色差物鏡2X/0.055, 5X/0.14, 10X/0.28, 20X/0.29, 50X/0.42
Long Working Distance, Plan Apo Objectives 2X/0.055, 5X/0.14, 10X/0.28, 20X/0.29, 50X/0.42
◇ 五孔物鏡轉(zhuǎn)換器
Quintuple Nosepiece
◇ 6″雙層活動(dòng)平臺(tái)和圓平臺(tái)
6″Double Layers Mechanical Stage and circle stage
◇ 同軸粗微調(diào)焦機(jī)構(gòu),微動(dòng)格值0.002mm
Coaxial Coarse & Fin Focus Adjustment System, Fine Division 0.002mm
◇照明系統(tǒng) Illumination System
冷光源光纖反射照明器:12V150W
Cold Light Fiber Reflected Illnminator: 12V150W
